Beschreibung der Beschaffung
1 pc of Spray Acid Tool with follow options: 2.4 System Configuration 2.4.13 Concentrations monitoring 2.4.14 End point detection for "Metal Strip" 2.4.15 Hook up of Ozone option (e.g. O3 generator, O3 destruct unit, O3 preparation). 2.9 Table with cassette /wafer specification 2.9.6 Processing of quartz wafers according to above mentioned specs 2.10.1 A complete listing with quotes for all necessary auxiliary equipment to operate the tool (e.g. pumps, heat-exchanger, gas-panels, scrubber,...) 2.10.2 Set of consumable parts (lamps, o-rings, valves, etc.) to cover the warranty period 2.10.3 Signal light tower