23419-2022 - ResultRomania-Măgurele: Magnetrons
OJ S 11/2022 17/01/2022
Contract award notice
Supplies
Legal Basis:
Directive 2014/24/EU

Section I: Contracting authority

I.1.
Name and addresses
Official name: INSTITUTUL NATIONAL DE CERCETARE-DEZVOLTARE PENTRU FIZICA LASERILOR, PLASMEI SI RADIATIEI
National registration number: RO 9052135
Postal address: Strada: Atomistilor, nr. 409
Town: Magurele
NUTS code: RO322 Ilfov
Postal code: 077125
Country: Romania
Contact person: MIHAELA CONSTANTIN
E-mail: mihaela.constantin@inflpr.ro
Telephone: +40 214574923
Fax: +40 214574923
Internet address(es):
Main address: www.inflpr.ro
Address of the buyer profile: www.e-licitatie.ro
I.4.
Type of the contracting authority
Other type: CERCETARE-DEZVOLTARE
I.5.
Main activity
Other activity: cercetare dezvoltare

Section II: Object

II.1.
Scope of the procurement
II.1.1.
Title
INSTALAȚIE DEPUNERI STRATURI SUBȚIRI PRIN PULVERIZARE MAGNETRON
Reference number: 9052135/2021/8
II.1.2.
Main CPV code
31711421 Magnetrons
II.1.3.
Type of contract
Supplies
II.1.4.
Short description
Furnizare, instalare, testare, instruire personal beneficiar si punere in functiune instalație depuneri straturi subțiri prin pulverizare magnetron. Numarul de zile pana la care se pot solicita clarificari inainte de data limita de depunere a ofertelor/candidaturilor: 18 zile. Entitatea contractanta va raspunde in mod clar si complet tuturor solicitarilor de clarificare/informatiilor suplimentare cel tarziu in a 11-a zi inainte de data limita de depunere a ofertelor.
II.1.6.
Information about lots
This contract is divided into lots: no
II.1.7.
Total value of the procurement
Value excluding VAT: 2 059 000,00 RON
II.2.
Description
II.2.3.
Place of performance
NUTS code: RO322 Ilfov
Main site or place of performance: Strada Atomistilor nr. 409, Magurele, Jud. Ilfov
II.2.4.
Description of the procurement
INSTALAȚIE DEPUNERI STRATURI SUBȚIRI PRIN PULVERIZARE MAGNETRON – 1 buc.
II.2.5.
Award criteria
Quality criterion - Name: Sistemul poate fi controlat in presiune, pe langa modul obligatoriu „downstream”, si in modul suplimentar “upstream”, robinetul de separare catre pompe mentinandu-si o pozitie fixa, iar fluxurile de gaze introduse in descarcare vor fi controlate prin controler PID. / Weighting: 3
Quality criterion - Name: Asigurarea unei presiuni de baza de < 2x 10-7 mbar pentru sistemul complet echipat, fata de cerinta minima a caietului de sarcini, respectiv < 2x 10-6 mbar. / Weighting: 4
Quality criterion - Name: Extindere de garantie de 12 luni peste cea din cerintele minime de 12 luni. / Weighting: 5
Quality criterion - Name: Analizor de gaze rezidual (RGA) avand toate caracteristicile functionale minime specificate ce permite monitorizarea maselor pana la 200 amu, fata de cerinta minima a caietului de sarcini, respectiv 100 amu. / Weighting: 2
Quality criterion - Name: Subsistemul pentru controlul si monitorarea in timp real a grosimii filmelor depuse pe baza de microbalanta cu cristal de cuartz va fi prevazut cu sensori suplimentari capabili sa furnizeze informatii privind rata de depunere la nivelul substratului in cazul pulverizarii magnetron pentru pozitii laterale fata de cea centrala, respectiv la 6 cm si 9 cm fata de centru. / Weighting: 3
Quality criterion - Name: Sistemul poate fi prevazut cu o sursa suplimentara RF (13,56 MHz) cu cutie de adaptare automata, avand puterea maxima de cel putin 100 W, care sa asigure polarizare BIAS la substrat si posibilitatea de curatare prin aprinderea unei descarcari la nivelul substratului, functionand independent de sursele de alimentare ale magnetroanelor. / Weighting: 3
Quality criterion - Name: In afara de cele 4 magnetroane de 3” (cerinta obligatorie), sistemul de depunere va fi livrat cu alte 2 magnetroane circulare suplimentare cu tinta de diametru 2 inch, care se pot monta pe pozitiile a 2 dintre magnetroanele initale si se pot alinia (prin inclinare) in asa fel incat sa vizeze centrul substratului. / Weighting: 4
Quality criterion - Name: Suportul de substrat avand caracteristicile functionale minime precizate in caietul de sarcini va permite incalzirea substratului pana la 800 °C in mod controlat, fata de cerinta minima a caietului de sarcini, respectiv 600 oC, inclusiv in atmosfera de oxigen, fiind prevazut cu controler de temperatura tip PID. / Weighting: 1
Price - Weighting: 75
II.2.11.
Information about options
Options: no
II.2.13.
Information about European Union funds
The procurement is related to a project and/or programme financed by European Union funds: yes
Identification of the project: POC 2014-2020, Axa Prioritara 1 (Cercetare, Dezvoltare tehnologica si inovare (CDI) in sprijinul competitivitatii economice si dezvoltarii afacerilor, Actiunea 1.1.1 – Mari infrastructuri de CD
II.2.14.
Additional information

Section IV: Procedure

IV.1.
Description
IV.1.1.
Type of procedure
Open procedure
IV.1.3.
Information about a framework agreement or a dynamic purchasing system
IV.1.8.
Information about the Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement: no
IV.2.
Administrative information
IV.2.1.
Previous publication concerning this procedure
Notice number in the OJ S: 2021/S 080-205309
IV.2.8.
Information about termination of dynamic purchasing system
IV.2.9.
Information about termination of call for competition in the form of a prior information notice

Section V: Award of contract

Contract No: 83
Title:
Instalație depuneri straturi subțiri prin pulverizare magnetron
A contract/lot is awarded: yes
V.2.
Award of contract
V.2.1.
Date of conclusion of the contract
29/11/2021
V.2.2.
Information about tenders
Number of tenders received: 1
Number of tenders received from SMEs: 1
Number of tenders received from tenderers from other EU Member States: 0
Number of tenders received from tenderers from non-EU Member States: 1
Number of tenders received by electronic means: 1
The contract has been awarded to a group of economic operators: yes
V.2.3.
Name and address of the contractor
Official name: VST services Ltd.
National registration number: 557630225
Postal address: Strada -, Nr. -
Town: NA
NUTS code: IL Israel
Country: Israel
E-mail: angel@vstser.com
Telephone: +972 39247712
Fax: +972 39247711
Internet address: www.vacuumltd.com
The contractor is an SME: yes
V.2.3.
Name and address of the contractor
Official name: APEL LASER
National registration number: RO 15595373
Postal address: Strada Mihăilescu Vintilă, Nr. 15, Sector: 6
Town: Bucuresti
NUTS code: RO321 Bucureşti
Postal code: 060394
Country: Romania
E-mail: office@apellaser.ro
Telephone: +40 213170910
Fax: +40 213170910
Internet address: www.apellaser.ro
The contractor is an SME: yes
V.2.4.
Information on value of the contract/lot
Initial estimated total value of the contract/lot: 2 195 717,00 RON
Total value of the contract/lot: 2 059 000,00 RON
V.2.5.
Information about subcontracting

Section VI: Complementary information

VI.3.
Additional information
VI.4.
Procedures for review
VI.4.1.
Review body
Official name: Consiliul National de Solutionare a Contestatiilor
Postal address: Str. Stavropoleos nr. 6, sector 3
Town: Bucuresti
Postal code: 030084
Country: Romania
E-mail: office@cnsc.ro
Telephone: +40 213104641
Fax: +40 213104642 / +40 218900745
Internet address: http://www.cnsc.ro
VI.4.4.
Service from which information about the review procedure may be obtained
Official name: Oficiul juridic INFLPR
Postal address: Str.Atomistilor nr.409, jud. Ilfov
Town: Magurele (Ilfov)
Postal code: 077125
Country: Romania
Telephone: +40 214574489
Fax: +40 214574243
Internet address: www.inflpr.ro
VI.5.
Date of dispatch of this notice
12/01/2022