301283-2026 - Competition
Germany – Miscellaneous general and special-purpose machinery – Wafer cleaner / mask cleaner (IAF-08.3) - PR1146362-2050-P
OJ S 85/2026 04/05/2026
Contract or concession notice – standard regime - Change notice
Supplies
1. Buyer
1.1.
Buyer
Official name: Fraunhofer-Gesellschaft - Einkauf B12
Email: einkauf@zv.fraunhofer.de
Legal type of the buyer: Public undertaking
Activity of the contracting authority: General public services
2. Procedure
2.1.
Procedure
Title: Wafer cleaner / mask cleaner (IAF-08.3) - PR1146362-2050-P
Description: Wafer cleaner / mask cleaner (IAF-08.3)
Procedure identifier: 4e0b4393-902a-48ff-b861-c78cba891910
Internal identifier: PR1146362-2050-P
Type of procedure: Open
The procedure is accelerated: no
2.1.1.
Purpose
Main nature of the contract: Supplies
Main classification (cpv): 42900000 Miscellaneous general and special-purpose machinery
2.1.2.
Place of performance
Postal address: Tullastr. 72  
Town: Freiburg
Postcode: 79108
Country subdivision (NUTS): Freiburg im Breisgau, Stadtkreis (DE131)
Country: Germany
2.1.4.
General information
Legal basis: 
Directive 2014/24/EU
vgv -
2.1.6.
Grounds for exclusion
Sources of grounds for exclusion: Notice, Procurement Document, European Single Procurement Document (ESPD)
Analogous situation like bankruptcy, insolvency or arrangement with creditors under national law: 
Corruption: 
Participation in a criminal organisation: 
Agreements with other economic operators aimed at distorting competition: 
Breaching of obligations in the fields of environmental law: 
Money laundering or terrorist financing: 
Fraud: 
Child labour and including other forms of trafficking in human beings: 
Insolvency: 
Breaching of obligations in the fields of labour law: 
Assets being administered by liquidator: 
Misrepresentation, withheld information, unable to provide required documents or obtained confidential information of this procedure: 
Conflict of interest due to its participation in the procurement procedure: 
Direct or indirect involvement in the preparation of this procurement procedure: 
Grave professional misconduct: 
Early termination, damages, or other comparable sanctions: 
Breaching of obligations in the fields of social law: 
Breaching obligation relating to payment of social security contributions: 
Business activities are suspended: 
Breaching obligation relating to payment of taxes: 
Terrorist offences or offences linked to terrorist activities: 
Breaching of obligations set under purely national exclusion grounds: All relevant mandatory and optional grounds for exclusion standardised by national law apply.
5. Lot
5.1.
Lot: LOT-0000
Title: Wafer cleaner / mask cleaner (IAF-08.3) - PR1146362-2050-P
Description: Wafer cleaner / mask cleaner (IAF-08.3) The requirement is for a wafer and mask cleaning machine to be installed in an ISO Class 4 cleanroom and which must comply with European safety regulations for industrial equipment. The system is intended to remove particles and contaminants from wafers and lithography masks using aqueous and acidic solutions, based on the RCA cleaning process. To ensure safe operation and a long service life, the process chamber must be made of process-media-resistant material and be equipped with an extraction system and leak detection. The system must be capable of reliably removing particles larger than 250 nm from (quartz) glass or wafers in order to ensure the purity required for the processes in the Fraunhofer IAF cleanroom and not to compromise process yield. Translated with DeepL.com (free version)
Internal identifier: LOT-0000
5.1.1.
Purpose
Main nature of the contract: Supplies
Main classification (cpv): 42900000 Miscellaneous general and special-purpose machinery
5.1.2.
Place of performance
Postal address: Tullastr. 72  
Town: Freiburg
Postcode: 79108
Country subdivision (NUTS): Freiburg im Breisgau, Stadtkreis (DE131)
Country: Germany
5.1.3.
Estimated duration
Duration: 14 Months
5.1.6.
General information
Reserved participation: 
Participation is not reserved.
The names and professional qualifications of the staff assigned to perform the contract must be given: Not required
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA): yes
This procurement is also suitable for small and medium-sized enterprises (SMEs): no
5.1.7.
Strategic procurement
Aim of strategic procurement: No strategic procurement
5.1.9.
Selection criteria
Sources of selection criteria: Notice, Procurement Document
Criterion: References on specified works
Description of selection criterion: At least 3 references (no more than 3 years old) for the same or comparable systems for cleaning masks and/or wafers. Comparable systems are defined as systems that use aqueous solutions to clean wafers and/or masks/reticles of particles and contaminants (see specifications). Please provide: - Customer name - Customer category (research, industry, etc.) - Brief description of the equipment - Intended use of the equipment

Criterion: Average yearly manpower
Description of selection criterion: Company profile Minimum information: year of establishment, important milestones of the company, number of employees, what is manufactured/what services are provided --> Please provide all information in text form, NO links or images.

Criterion: Other economic or financial requirements
Description of selection criterion: 1. Self-declaration that there are no grounds for exclusion pursuant to Sections 123 and 124 of the German Act against Restraints of Competition (GWB) 2. Self-declaration (EU) No. 833/2014

Criterion: Financial ratio
Description of selection criterion: Turnover in the 'Semiconductor Manufacturing Equipment’ product division The annual turnover in the 'Semiconductor Manufacturing Equipment’ product division must be stated for each of the last three completed financial years. Minimum requirement: The contracting authority shall calculate the average annual turnover (arithmetic mean) for the last three completed financial years from the annual turnover figures provided. This average must be at least €450,000. If this average is not achieved, the minimum requirement is deemed not to have been met.
5.1.10.
Award criteria
Criterion: 
Type: Quality
Name: Technical Specification
Description: technical specification
Category of award weight criterion: Weight (percentage, exact)
Award criterion number: 65
Criterion: 
Type: Price
Name: Price
Description: Price
Category of award weight criterion: Weight (percentage, exact)
Award criterion number: 35
5.1.11.
Procurement documents
Languages in which the procurement documents are officially available: German
Address of the procurement documents: https://vergabe.fraunhofer.de/NetServer/TenderingProcedureDetails?function=_Details&TenderOID=54321-Tender-19caecb896a-5dc2f1a28741b4a2
5.1.12.
Terms of procurement
Terms of submission: 
Electronic submission: Allowed
Address for submission: https://vergabe.fraunhofer.de
Languages in which tenders or requests to participate may be submitted: German, English
Electronic catalogue: Not allowed
Variants: Not allowed
Tenderers may submit more than one tender: Allowed
Deadline for receipt of tenders: 12/05/2026 09:30:00 (UTC+02:00) Eastern European Time, Central European Summer Time
Duration during which the tender must remain valid: 56 Days
Information that can be supplemented after the submission deadline: 
At the discretion of the buyer, all missing tenderer-related documents may be submitted later.
Additional information: See procurement documents
Information about public opening: 
Opening date: 12/05/2026 09:30:00 (UTC+02:00) Eastern European Time, Central European Summer Time
Terms of contract: 
The execution of the contract must be performed within the framework of sheltered employment programmes: No
Conditions relating to the performance of the contract: In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under "Tendering terms". Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Electronic invoicing: Allowed
Electronic ordering will be used: no
Electronic payment will be used: no
5.1.15.
Techniques
Framework agreement: 
No framework agreement
Information about the dynamic purchasing system: 
No dynamic purchase system
5.1.16.
Further information, mediation and review
Review organisation: Vergabekammern des Bundes
Information about review deadlines: Applications for review are not permitted if more than 15 calendar days have passed since receipt of notification from the contracting authority that it is unwilling to redress an objection (section 160 (3) sentence 1 no. 4 of the German Competition Act (Gesetz gegen Wettbewerbsbeschränkungen, GWB)). Additionally, applications for review are not permitted if an award has been made before the public procurement tribunal has informed the contracting authority about the application for review (sections 168 (2) sentence 1 and 169 (1) GWB). Contracts may be awarded 15 calendar days after the tenderer information pursuant to section 134 (1) GWB has been sent. If the information is sent electronically or by fax, the period shall be reduced to ten calendar days (section 134 (2) GWB). The period shall begin on the day after which the contracting authority sends the information; the date of receipt by the tenderer and candidate in question shall be irrelevant. The admissibility of a review application also requires that the applicant notified the contracting authority about the claimed violations of public procurement provisions within ten calendar days of becoming aware of them (section 160 (3) sentence 1 no. 1 GWB). Violations of public procurement provisions which become apparent from the tender notice must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender specified in the notice (section 160 (3) sentence 1 no. 2 GWB). Violations of public procurement provisions which only become apparent from the procurement documents must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender (section 160 (3) sentence 1 no. 3 GWB).
Organisation providing additional information about the procurement procedure: Fraunhofer-Gesellschaft - Einkauf B12
Organisation providing more information on the review procedures: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
8. Organisations
8.1.
ORG-7001
Official name: Fraunhofer-Gesellschaft - Einkauf B12
Registration number: DE 129515865
Postal address: Hansastraße 27c
Town: München
Postcode: 80686
Country subdivision (NUTS): München, Kreisfreie Stadt (DE212)
Country: Germany
Contact point: Einkauf Betrieb und Infrastruktur
Email: einkauf@zv.fraunhofer.de
Telephone: +49891205-0
Internet address: https://vergabe.fraunhofer.de/
Buyer profile: https://vergabe.fraunhofer.de/NetServer/
Roles of this organisation: 
Buyer
Central purchasing body awarding public contracts or concluding framework agreements for works, supplies or services intended for other buyers
Organisation providing additional information about the procurement procedure
8.1.
ORG-7004
Official name: Vergabekammern des Bundes
Registration number: t:022894990
Postal address: Kaiser-Friedrich-Straße 16
Town: Bonn
Postcode: 53113
Country subdivision (NUTS): Bonn, Kreisfreie Stadt (DEA22)
Country: Germany
Email: vk@bundeskartellamt.bund.de
Telephone: +49 228 9499-0
Roles of this organisation: 
Review organisation
8.1.
ORG-7005
Official name: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Registration number: DE-129515865
Postal address: Hansastraße 27c
Town: München
Postcode: 80686
Country subdivision (NUTS): München, Kreisfreie Stadt (DE212)
Country: Germany
Email: einkauf@zv.fraunhofer.de
Telephone: +49 89 1205-0
Internet address: https://www.fraunhofer.de
Roles of this organisation: 
Organisation providing more information on the review procedures
8.1.
ORG-7006
Official name: Datenservice Öffentlicher Einkauf (in Verantwortung des Beschaffungsamts des BMI)
Registration number: 0204:994-DOEVD-83
Town: Bonn
Postcode: 53119
Country subdivision (NUTS): Bonn, Kreisfreie Stadt (DEA22)
Country: Germany
Email: noreply.esender_hub@bescha.bund.de
Telephone: +49228996100
Roles of this organisation: 
TED eSender
10. Change
Version of the previous notice to be changed: dc3aa9a6-df2a-4fa0-b190-a2deed3e3195-01
Main reason for change: Buyer correction
Description: Update to the tender documents and extension of the tender and binding period
10.1.
Change
Section identifier: LOT-0000
Notice information
Notice identifier/version: 3715170f-aeb8-4e84-800e-bd9843c4a9a5  -  01
Form type: Competition
Notice type: Contract or concession notice – standard regime
Notice subtype: 16
Notice dispatch date: 30/04/2026 09:52:43 (UTC+02:00) Eastern European Time, Central European Summer Time
Languages in which this notice is officially available: German, English
Notice publication number: 301283-2026
OJ S issue number: 85/2026
Publication date: 04/05/2026