1. Buyer
1.1.
Buyer
Official name: Paul Scherrer Institut (PSI)
Legal type of the buyer: Body governed by public law
Activity of the contracting authority: Education
2. Procedure
2.1.
Procedure
Title: Multitube thermal processing furnace (MTPF) for oxidation and LPCVD at the PSI PICO cleanroom
Description: The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. The MTPF shall be delivered with four 200 mm compatible tubes: – Tube 1: atmospheric thermal dry and wet oxidation (quartz tube up to 1050°C; optional SiC tube up to 1250°C); – Tube 2: LPCVD stoichiometric Si3N4 layers for photonic applications and low-stress SiNx layers for membrane fabrication; – Tube 3: LPCVD TEOS-based SiO2 layers; – Tube 4: LPCVD polycrystalline and amorphous Si. The MTPF shall be installed through the wall, with the loading station on the cleanroom side and the remaining equipment (furnaces, electronic racks, gas cabinets, pumps and related infrastructure) on the gray room side. It shall be capable of 24/7 operation with a guaranteed uptime of at least 90% and a minimum 2-year warranty.
Procedure identifier: d74d9614-7dfe-4e07-a231-9f9897b42fc7
Type of procedure: Open
The procedure is accelerated: no
2.1.1.
Purpose
Main nature of the contract: Supplies
Main classification (cpv): 38000000 Laboratory, optical and precision equipments (excl. glasses)
2.1.2.
Place of performance
Town: Villigen PSI
Postcode: 5232
Country subdivision (NUTS): Aargau (CH033)
Country: Switzerland
2.1.4.
General information
Additional information: Other requirements The bidder must confirm acceptance of the terms of business and the essential requirements in writing. The contractor shall award this contract only to bidders who comply with the conditions stipulated in the tender documents and the legislation, in particular occupational health and safety regulations, ruleson working conditions, equal pay regulations, as well asenvironmental law, competition law and anti-corruption provisions.
Legal basis:
Directive 2014/24/EU
2.1.6.
Grounds for exclusion
Sources of grounds for exclusion: Procurement Document
5. Lot
5.1.
Lot: LOT-0000
Title: Multitube thermal processing furnace (MTPF) for oxidation and LPCVD at the PSI PICO cleanroom
Description: The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. The MTPF shall be delivered with four 200 mm compatible tubes: – Tube 1: atmospheric thermal dry and wet oxidation (quartz tube up to 1050°C; optional SiC tube up to 1250°C); – Tube 2: LPCVD stoichiometric Si3N4 layers for photonic applications and low-stress SiNx layers for membrane fabrication; – Tube 3: LPCVD TEOS-based SiO2 layers; – Tube 4: LPCVD polycrystalline and amorphous Si. The MTPF shall be installed through the wall, with the loading station on the cleanroom side and the remaining equipment (furnaces, electronic racks, gas cabinets, pumps and related infrastructure) on the gray room side. It shall be capable of 24/7 operation with a guaranteed uptime of at least 90% and a minimum 2-year warranty.
5.1.1.
Purpose
Main nature of the contract: Supplies
Main classification (cpv): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Options:
Description of the options: According specification PSI-PICO-JK67-001 Rev.2.0 chapter 1.5.3
5.1.2.
Place of performance
Town: Villigen PSI
Postcode: 5232
Country subdivision (NUTS): Aargau (CH033)
Country: Switzerland
5.1.3.
Estimated duration
Other duration: Unknown
5.1.4.
Renewal
Maximum renewals: 1
5.1.6.
General information
Reserved participation:
Participation is not reserved.
The names and professional qualifications of the staff assigned to perform the contract must be given: Not yet known
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA): yes
5.1.9.
Selection criteria
Sources of selection criteria: Procurement Document
5.1.10.
Award criteria
Criterion:
Type: Quality
Description: Award criteria
Description of the method to be used if weighting cannot be expressed by criteria: The award criteria are defined in the documentation.
5.1.11.
Procurement documents
Access to certain procurement documents is restricted
Ad hoc communication channel:
Name: Simap.ch
5.1.12.
Terms of procurement
Terms of submission:
Electronic submission: Allowed
Languages in which tenders or requests to participate may be submitted: English
Electronic catalogue: Not allowed
Variants: Allowed
Tenderers may submit more than one tender: Not allowed
Deadline for receipt of tenders: 20/07/2026 14:00:00 (UTC+02:00) Eastern European Time, Central European Summer Time
Duration during which the tender must remain valid: 120 Days
Terms of contract:
The execution of the contract must be performed within the framework of sheltered employment programmes: Not yet known
Conditions relating to the performance of the contract: Further details in the official publication on simap.ch
Electronic invoicing: Required
Electronic ordering will be used: no
Electronic payment will be used: yes
Financial arrangement: Further details in the official publication on simap.ch
5.1.15.
Techniques
Framework agreement:
No framework agreement
Information about the dynamic purchasing system:
No dynamic purchase system
5.1.16.
Further information, mediation and review
Review organisation: Tribunal administrativ federal
Information about review deadlines: Instructions on legal remedies In accordance with Article 56 paragraph 1 of the Public Procurement Act (PPA), a written appeal against this decision can be lodged with the Federal Administrative Court, P.O. Box, 9023 St. Gallen, Switzerland, within 20 days of notification. Any appeal is to be submitted in duplicate and must include what is being sought, the grounds for appeal, evidence and the signature of the person lodging the appeal or his or her representative. A copy of this decision and available evidence must be included. The provisions of the Administrative Procedure Act (APA) on legal holidays do not apply in accordance with Article 56 paragraph 2 of the PPA.
Organisation providing additional information about the procurement procedure: Paul Scherrer Institut (PSI)
8. Organisations
8.1.
ORG-0001
Official name: Paul Scherrer Institut (PSI)
Registration number: f4721657-d1c4-47f0-8a74-0f469b30c505
Postal address: Forschungsstrasse 111
Town: Villigen PSI
Postcode: 5232
Country subdivision (NUTS): Aargau (CH033)
Country: Switzerland
Telephone: +41563102111
Roles of this organisation:
Buyer
Organisation providing additional information about the procurement procedure
8.1.
ORG-0002
Official name: Tribunal administrativ federal
Registration number: BVGER
Postal address: Postfach
Town: St. Gallen
Postcode: 9023
Country subdivision (NUTS): St. Gallen (CH055)
Country: Switzerland
Telephone: +41584652626
Roles of this organisation:
Review organisation
8.1.
ORG-0003
Official name: Simap.ch
Registration number: CH001
Postal address: Holzikofenweg 36
Town: Bern
Postcode: 3003
Country subdivision (NUTS): Bern / Berne (CH021)
Country: Switzerland
Telephone: +41584646388
Roles of this organisation:
TED eSender
10. Change
10.1.
Change
Section identifier: PROCEDURE
Section identifier: LOT-0000
Description of changes: Please note the updated dates and documents: All changes are listed on the last 3 pages of the Requirements specification PSI-PICO-JK67-001 Rev. 2.0. All changed documents are available in the file: "Rev. 2.0 documents.zip" The deadline for proof of eligibility criteria for ‘STEP 1’ changed to 03.06.2026.
Notice identifier/version: f94c5f23-32c4-4d88-8296-607fb8c4b7bc - 01
Form type: Competition
Notice type: Contract or concession notice – standard regime
Notice subtype: 16
Notice dispatch date: 21/05/2026 02:26:00 (UTC+02:00) Eastern European Time, Central European Summer Time
Languages in which this notice is officially available: English, German, French
Notice publication number: 351519-2026
OJ S issue number: 98/2026
Publication date: 22/05/2026