2026-05-22+02:0000:00:00+02:000RES-000100selec-wTEN-0001tenders1CON-0001LOT-0001TEN-00010noTPA-0001LOT-0001ASML NL-LOT-0001CON-0001CONASMLTEN-0001TPA-0001ORG-000429ORG-0001Imec EU Pilot line NVImec EU Pilot line NVKapeldreef 75Heverlee3001BE242BEL1004987603_21101+32 16287789tom.wauters@imec.behttps://bosa.belgium.beORG-0002FOD Beleid en OndersteuningFPS Policy and SupportSimon Bolivarlaan 30, bus 1Brussel1000BE100BELBE001+32 2 740 80 00revise@publicprocurement.beORG-0003Ondernemingsrechtbank LeuvenCommercial Court LeuvenLeuven 3000BE242BEL0308357753largeORG-0004ASML NLASML NLDe Run 6501Veldhoven5504DRNL414NLDNL007051104B01_3d1803fc-5ee9-4b1b-91c5-b3e4664618a8syed.zaid.ali@asml.com00357867-202699/20262026-05-26+02:002.3eforms-sdk-1.1317b8245d-edcf-4c2d-ae11-d11ca089ed73c1eefc97-2527-43c7-818a-9d68098e40e12026-05-22+02:0000:00:00+02:00012026-05-26+02:0032014L0024can-standardNLDENGhttps://www.publicprocurement.be/bda?organisationIds=21101&includeOrganisationChildren=truecgagen-pubORG-0001ted-esenORG-0002neg-wo-calltechnicalZie besteksdocumentenSee tender documentsJPA2026ID53Advanced Lithography EUV ScannerAdvanced Lithography EUV ScannerThe Low NA scanner is a state-of-the-art EUV scanner enabling exploration and further expansion of the EUV patterning, using exploratory materials and novel designs, in the logic and memory devices. Next to the resolution the low NA-scanner can give the improved overlay performance and throughput are crucial for the continuous evolving semiconductor devices.De Low NA-scanner is een geavanceerde EUV-scanner die het mogelijk maakt om de EUV-patroonvorming verder te verkennen en uit te breiden, met behulp van experimentele materialen en innovatieve ontwerpen, in logische en geheugenchips. Naast de resolutie biedt de Low NA-scanner verbeterde overlay-prestaties en doorvoercapaciteit, wat van cruciaal belang is voor de voortdurend evoluerende halfgeleidercomponenten. supplies38000000BE242BELLOT-0001falseeu-fundsZie besteksdocumentenSee tender documentspriceZie besteksdocumentenSee tender documentsZie besteksdocumentenSee tender documentsORG-0003truefalsebuyer-categoriesnonenone1JPA2026ID53 - 1JPA2026ID53 - 1Advanced Lithography EUV ScannerAdvanced Lithography EUV Scannersupplies38000000BE242BELUNLIMITED2000-01-01+01:00