1. Buyer
1.1.
Buyer
Official name: Lehrstuhl für Technische Physik E23, TUM
Legal type of the buyer: Body governed by public law, controlled by a regional authority
Activity of the contracting authority: Education
2. Procedure
2.1.
Procedure
Title: Deposition Tool 8 Inch
Description: The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a UHV chamber for sputtering of superconductors, a UHV chamber for oxidation, a UHV chamber for Ar ion milling, and a flipping station. The system must allow metalizing both sides of the wafers in situ, with minimal backside particle contamination. The wafers should only be touched on the side (edge gripping).
Procedure identifier: e06c816c-ffcf-4865-9128-954fd6ae4046
Internal identifier: TUM-E23-2026-01
Type of procedure: Open
The procedure is accelerated: no
2.1.1.
Purpose
Main nature of the contract: Supplies
Main classification (cpv): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification (cpv): 42900000 Miscellaneous general and special-purpose machinery
2.1.2.
Place of performance
Postal address: Walther-Meissner-Str. 8
Town: Garching
Postcode: 85748
Country subdivision (NUTS): München, Landkreis (DE21H)
Country: Germany
2.1.4.
General information
Additional information: #Bekanntmachungs-ID: CXP4YZ8M7XK#
Legal basis:
Directive 2014/24/EU
vgv -
2.1.6.
Grounds for exclusion
Sources of grounds for exclusion: Notice
Breaching of obligations set under purely national exclusion grounds:
Participation in a criminal organisation:
Money laundering or terrorist financing:
Fraud:
Corruption:
Child labour and including other forms of trafficking in human beings:
Breaching obligation relating to payment of taxes:
Breaching obligation relating to payment of social security contributions:
Breaching of obligations in the fields of environmental law:
Breaching of obligations in the fields of social law:
Breaching of obligations in the fields of labour law:
Insolvency:
Assets being administered by liquidator:
Business activities are suspended:
Analogous situation like bankruptcy, insolvency or arrangement with creditors under national law:
Grave professional misconduct:
Agreements with other economic operators aimed at distorting competition:
Conflict of interest due to its participation in the procurement procedure:
Direct or indirect involvement in the preparation of this procurement procedure:
Early termination, damages, or other comparable sanctions:
Misrepresentation, withheld information, unable to provide required documents or obtained confidential information of this procedure:
5. Lot
5.1.
Lot: LOT-0001
Title: Deposition Tool 8 Inch
Description: siehe Leistungsbeschreibung.
Internal identifier: TUM-E23-2026-01
5.1.1.
Purpose
Main nature of the contract: Supplies
Main classification (cpv): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification (cpv): 42900000 Miscellaneous general and special-purpose machinery
5.1.2.
Place of performance
Postal address: Walther-Meissner-Str. 8
Town: Garching
Postcode: 85748
Country subdivision (NUTS): München, Landkreis (DE21H)
Country: Germany
5.1.3.
Estimated duration
Other duration: Unlimited
5.1.6.
General information
Reserved participation:
Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA): yes
This procurement is also suitable for small and medium-sized enterprises (SMEs): no
5.1.7.
Strategic procurement
Aim of strategic procurement: No strategic procurement
5.1.9.
Selection criteria
Sources of selection criteria: Procurement Document
5.1.10.
Award criteria
Criterion:
Type: Quality
Description: Siehe Vergabeunterlagen
Description of the method to be used if weighting cannot be expressed by criteria: Siehe Vergabeunterlagen
5.1.11.
Procurement documents
Languages in which the procurement documents are officially available: German
Deadline for requesting additional information: 28/09/2026 23:59:59 (UTC+02:00) Eastern European Time, Central European Summer Time
Ad hoc communication channel:
5.1.12.
Terms of procurement
Terms of submission:
Electronic submission: Required
Languages in which tenders or requests to participate may be submitted: German, English
Electronic catalogue: Required
Variants: Allowed
Tenderers may submit more than one tender: Not allowed
Deadline for receipt of tenders: 05/10/2026 12:00:00 (UTC+02:00) Eastern European Time, Central European Summer Time
Duration during which the tender must remain valid: 4 Weeks
Information that can be supplemented after the submission deadline:
At the discretion of the buyer, some missing tenderer-related documents may be submitted later.
Additional information: -
Information about public opening:
Opening date: 05/10/2026 12:01:00 (UTC+02:00) Eastern European Time, Central European Summer Time
Terms of contract:
The execution of the contract must be performed within the framework of sheltered employment programmes: No
Conditions relating to the performance of the contract: siehe Vergabeunterlagen.
Electronic invoicing: Required
Electronic ordering will be used: no
Electronic payment will be used: no
5.1.15.
Techniques
Framework agreement:
No framework agreement
Information about the dynamic purchasing system:
No dynamic purchase system
5.1.16.
Further information, mediation and review
Mediation organisation: Regierung von Oberbayern - Vergabestelle Südbayern
Review organisation: Regierung von Oberbayern - Vergabestelle Südbayern
Organisation providing additional information about the procurement procedure: Lehrstuhl für Technische Physik E23, TUM
Organisation providing more information on the review procedures: Regierung von Oberbayern - Vergabestelle Südbayern
Organisation receiving requests to participate: Lehrstuhl für Technische Physik E23, TUM
8. Organisations
8.1.
ORG-0001
Official name: Lehrstuhl für Technische Physik E23, TUM
Registration number: DE811193231
Postal address: Walther-Meißner-Str. 8
Town: Garching
Postcode: 85478
Country subdivision (NUTS): München, Landkreis (DE21H)
Country: Germany
Contact point: LS für Technische Physik, Walther-Meißner-Institut
Telephone: +49 8928914442
Fax: +49 8928914206
Roles of this organisation:
Buyer
Organisation providing additional information about the procurement procedure
Organisation receiving requests to participate
8.1.
ORG-0002
Official name: Regierung von Oberbayern - Vergabestelle Südbayern
Registration number: DE811335517
Postal address: Maximilianstraße 39
Town: München
Postcode: 80538
Country subdivision (NUTS): München, Kreisfreie Stadt (DE212)
Country: Germany
Contact point: Zentrale Vergabestelle, IuK
Telephone: +49 892176-2411
Fax: +49 892176-2847
Roles of this organisation:
Review organisation
Organisation providing more information on the review procedures
Mediation organisation
8.1.
ORG-0003
Official name: Datenservice Öffentlicher Einkauf (in Verantwortung des Beschaffungsamts des BMI)
Registration number: 0204:994-DOEVD-83
Town: Bonn
Postcode: 53119
Country subdivision (NUTS): Bonn, Kreisfreie Stadt (DEA22)
Country: Germany
Telephone: +49228996100
Roles of this organisation:
TED eSender
Notice identifier/version: b635f593-1b0a-4845-8a3f-6e8ade80f88d - 01
Form type: Competition
Notice type: Contract or concession notice – standard regime
Notice subtype: 16
Notice dispatch date: 20/08/2026 11:51:11 (UTC+02:00) Eastern European Time, Central European Summer Time
Languages in which this notice is officially available: German
Notice publication number: 579224-2026
OJ S issue number: 161/2026
Publication date: 21/08/2026