1. Buyer
1.1.
Buyer
Official name: Danmarks Tekniske Universitet - DTU
Legal type of the buyer: Body governed by public law
Activity of the contracting authority: Education
2. Procedure
2.1.
Procedure
Title: Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)
Description: DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.
Procedure identifier: 3f758954-4e93-40e3-954b-d4f8b1299542
Internal identifier: 10528
Type of procedure: Open
The procedure is accelerated: no
2.1.1.
Purpose
Main nature of the contract: Supplies
Additional nature of the contract: Services
Main classification (cpv): 42000000 Industrial machinery
Additional classification (cpv): 38636110 Industrial lasers, 38810000 Industrial process control equipment
2.1.2.
Place of performance
Postal address: Technical University of Denmark, NanoLab, Ørsted Plads, Building 347
Town: Kgs. Lyngby
Postcode: 2800
Country subdivision (NUTS): Nordsjælland (DK013)
Country: Denmark
2.1.4.
General information
Additional information: General information on participation in the procurement procedure: Participation in the procurement procedure may only take place electronically via the Contracting Authority’s electronic procurement system. To gain access to the procurement documents, the tenderer must be registered or register as a user. If the procurement documents contain multiple versions of the same document, the most recently uploaded version shall prevail. All communication in connection with the procurement procedure, including questions and answers, must take place via the electronic procurement system. Questions must be submitted in due time to enable the Contracting Authority to obtain the necessary information and provide responses no later than six days before the expiry of the tender deadline. Questions received later than six days before the deadline cannot be expected to be answered unless the deadline is simultaneously extended. Interested parties are encouraged to keep themselves informed via the electronic procurement system. If the applicant experiences technical issues with the system, support may be contacted via email at dksupport@eu-supply.com or by telephone at (+45) 70 20 80 14. The tenderer must submit an ESPD as preliminary documentation for the matters referred to in the Danish Public Procurement Act. It is not necessary for the tenderer to sign the ESPD. Prior to the award decision, the tenderer that the Contracting Authority intends to award the contract to must provide documentation for the information stated in the ESPD in accordance with sections 151–152 of the Danish Public Procurement Act, cf. section 153. As an alternative to the documentation referred to in sections 153–155, 157 and 158 of the Danish Public Procurement Act, the tenderer may submit a certificate of registration on an official list of approved economic operators, cf. section 156, issued by the competent authority. The Contracting Authority may only accept such certificates from tenderers established in the country that maintains the official list. Language: All correspondence relating to the procurement must be in English. Tenders must be submitted in English. The final contract will be concluded in English. The Contracting Authority may apply the procedure set out in section 159(5) of the Danish Public Procurement Act if the tender does not comply with the formal requirements set out in the procurement documents. Please note that the procurement is covered by Article 5k of Council Regulation (EU) No 833/2014, as amended. This provision contains a prohibition against awarding contracts to Russian companies and companies under Russian control, etc. (see Article 5k(1) for the precise definition of the entities covered by the prohibition). The Contracting Authority reserves the right at any time during the procurement procedure to request documentation that the economic operators are not covered by the prohibition, for example by requiring a declaration to that effect and/or documentation regarding the place of establishment and ownership structure of the operators, as well as any subcontractors.
Legal basis:
Directive 2014/24/EU
2.1.6.
Grounds for exclusion
Sources of grounds for exclusion: European Single Procurement Document (ESPD)
5. Lot
5.1.
Lot: LOT-0000
Title: Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)
Description: DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.
Internal identifier: 10528
5.1.1.
Purpose
Main nature of the contract: Supplies
Additional nature of the contract: Services
Main classification (cpv): 42000000 Industrial machinery
Additional classification (cpv): 38636110 Industrial lasers, 38810000 Industrial process control equipment
5.1.2.
Place of performance
Postal address: Technical University of Denmark, NanoLab, Ørsted Plads, Building 347
Town: Kgs. Lyngby
Postcode: 2800
Country subdivision (NUTS): Nordsjælland (DK013)
Country: Denmark
5.1.3.
Estimated duration
Other duration: Unknown
5.1.6.
General information
Reserved participation:
Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA): yes
This procurement is also suitable for small and medium-sized enterprises (SMEs): yes
Additional information: General information on participation in the procurement procedure: Participation in the procurement procedure may only take place electronically via the Contracting Authority’s electronic procurement system. To gain access to the procurement documents, the tenderer must be registered or register as a user. If the procurement documents contain multiple versions of the same document, the most recently uploaded version shall prevail. All communication in connection with the procurement procedure, including questions and answers, must take place via the electronic procurement system. Questions must be submitted in due time to enable the Contracting Authority to obtain the necessary information and provide responses no later than six days before the expiry of the tender deadline. Questions received later than six days before the deadline cannot be expected to be answered unless the deadline is simultaneously extended. Interested parties are encouraged to keep themselves informed via the electronic procurement system. If the applicant experiences technical issues with the system, support may be contacted via email at dksupport@eu-supply.com or by telephone at (+45) 70 20 80 14. The tenderer must submit an ESPD as preliminary documentation for the matters referred to in the Danish Public Procurement Act. It is not necessary for the tenderer to sign the ESPD. Prior to the award decision, the tenderer that the Contracting Authority intends to award the contract to must provide documentation for the information stated in the ESPD in accordance with sections 151–152 of the Danish Public Procurement Act, cf. section 153. As an alternative to the documentation referred to in sections 153–155, 157 and 158 of the Danish Public Procurement Act, the tenderer may submit a certificate of registration on an official list of approved economic operators, cf. section 156, issued by the competent authority. The Contracting Authority may only accept such certificates from tenderers established in the country that maintains the official list. Language: All correspondence relating to the procurement must be in English. Tenders must be submitted in English. The final contract will be concluded in English. The Contracting Authority may apply the procedure set out in section 159(5) of the Danish Public Procurement Act if the tender does not comply with the formal requirements set out in the procurement documents. Please note that the procurement is covered by Article 5k of Council Regulation (EU) No 833/2014, as amended. This provision contains a prohibition against awarding contracts to Russian companies and companies under Russian control, etc. (see Article 5k(1) for the precise definition of the entities covered by the prohibition). The Contracting Authority reserves the right at any time during the procurement procedure to request documentation that the economic operators are not covered by the prohibition, for example by requiring a declaration to that effect and/or documentation regarding the place of establishment and ownership structure of the operators, as well as any subcontractors.
5.1.9.
Selection criteria
Sources of selection criteria: Notice
Criterion: References on specified services
Description of selection criterion: The Tenderer must show that it has the technical and professional ability to fulfil the contract. The Ten-derer must demonstrate this by providing at least 3 relevant references for comparable agreements, showing that the Tenderer has previously delivered, installed and serviced a High ion density plasma etcher for etching of lithium niobate on insulator, substantially equivalent to the Instrument. The agreement, to which the reference refers, must not be more than 5 years old. The date is calculated from the last delivery date of the machine under the agreement in the reference.
5.1.10.
Award criteria
Criterion:
Type: Price
Name: Price
Description: Based on the offered prices
Category of award weight criterion: Weight (percentage, exact)
Award criterion number: 20
Criterion:
Type: Quality
Name: Quality, Functionality and Performance
Description: Based on the tenderers answers to Appendix 1
Category of award weight criterion: Weight (percentage, exact)
Award criterion number: 80
5.1.11.
Procurement documents
Languages in which the procurement documents are officially available: English
Deadline for requesting additional information: 08/10/2026 10:00:00 (UTC+00:00) Western European Time, GMT
5.1.12.
Terms of procurement
Terms of submission:
Electronic submission: Required
Languages in which tenders or requests to participate may be submitted: English
Electronic catalogue: Not allowed
Variants: Not allowed
Tenderers may submit more than one tender: Not allowed
Deadline for receipt of tenders: 15/10/2026 21:55:00 (UTC+00:00) Western European Time, GMT
Duration during which the tender must remain valid: 90 Days
Information that can be supplemented after the submission deadline:
At the discretion of the buyer, all missing tenderer-related documents may be submitted later.
Terms of contract:
The execution of the contract must be performed within the framework of sheltered employment programmes: No
Conditions relating to the performance of the contract: Please see the draft agreement which is part of the tender material.
A non-disclosure agreement is required: no
Electronic invoicing: Allowed
Electronic ordering will be used: yes
Electronic payment will be used: yes
5.1.15.
Techniques
Framework agreement:
No framework agreement
Information about the dynamic purchasing system:
No dynamic purchase system
5.1.16.
Further information, mediation and review
Review organisation: Klagenævnet for Udbud
Information about review deadlines: Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.
Organisation providing additional information about the procurement procedure: Danmarks Tekniske Universitet - DTU
Organisation providing offline access to the procurement documents: Danmarks Tekniske Universitet - DTU
Organisation providing more information on the review procedures: Konkurrence- og Forbrugerstyrelsen
8. Organisations
8.1.
ORG-0001
Official name: Danmarks Tekniske Universitet - DTU
Registration number: 30060946
Postal address: Anker Engelunds Vej 1
Town: Kgs. Lyngby
Postcode: 2800
Country subdivision (NUTS): Nordsjælland (DK013)
Country: Denmark
Contact point: Mikkel Taanum
Telephone: +45 20133820
Roles of this organisation:
Buyer
Organisation providing additional information about the procurement procedure
Organisation providing offline access to the procurement documents
8.1.
ORG-0002
Official name: Klagenævnet for Udbud
Registration number: 37795526
Postal address: Nævnenes hus, Toldboden 2
Town: Viborg
Postcode: 8800
Country subdivision (NUTS): Østjylland (DK042)
Country: Denmark
Telephone: +45 35291000
Roles of this organisation:
Review organisation
8.1.
ORG-0003
Official name: Konkurrence- og Forbrugerstyrelsen
Registration number: 10294819
Postal address: Carl Jacobsens Vej 35
Town: Valby
Postcode: 2500
Country subdivision (NUTS): Byen København (DK011)
Country: Denmark
Telephone: +45 41715000
Roles of this organisation:
Organisation providing more information on the review procedures
8.1.
ORG-0004
Official name: Mercell Holding ASA
Registration number: 980921565
Postal address: Askekroken 11
Town: Oslo
Postcode: 0277
Country subdivision (NUTS): Oslo (NO081)
Country: Norway
Contact point: eSender
Telephone: +47 21018800
Fax: +47 21018801
Roles of this organisation:
TED eSender
Notice identifier/version: c7b18e55-fad3-4e45-b7ab-4fb73896cc76 - 01
Form type: Competition
Notice type: Contract or concession notice – standard regime
Notice subtype: 16
Notice dispatch date: 10/09/2026 06:51:56 (UTC+00:00) Western European Time, GMT
Notice dispatch date (eSender): 10/09/2026 10:01:27 (UTC+00:00) Western European Time, GMT
Languages in which this notice is officially available: English
Notice publication number: 628101-2026
OJ S issue number: 176/2026
Publication date: 11/09/2026