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            <cbc:Description languageID="DEU">Das Physik-Institut plant die Beschaffung eines UHV-Clusters für gepulste Laserabscheidung und Sputtern (PLD-SP-CL) von epitaktischen Heterostrukturen mit Monolagen-Präzision. Das System wird die Materialsynthese auf Oxid-Substraten mit einer Fläche von bis zu 10 x 10 mm² ermöglichen. Die PLD- und Sputterkammern müssen Basisdrücke &lt; 10⁻⁷ mbar aufweisen und über eine Schleusenkammer für einen schnellen Probenaustausch zugänglich sein. Die PLD- und Sputterkammern müssen für den Probentransfer im Vakuum miteinander verbunden sein. Die PLD muss über in-situ RHEED zur Wachstumsüberwachung verfügen und Substrat-Temperaturen von mindestens 950°C ermöglichen. Die Sputteranlage ermöglicht das DC-Magnetron-Sputtern bei einer Substrattemperatur von bis zu 700°C. Das System muss mit der Verwendung von flag-style-type- Probenträgern und dem Transfer zu einem extern bereitgestellten Vakuumkoffer für den Transport zu anderen Ex-situ-Charakterisierungsgeräten kompatibel sein.

The Physics Institute plans the procurement of a UHV cluster for pulsed laser deposition and sputtering (PLD-SP-CL) of epitaxial heterostructures with monolayer precision. The system will enable materials synthesis on oxide substrates up to 10 x 10 mm² in area. The PLD and sputter chambers must have base pressures &lt; 10⁻⁷ mbar, and must be accessible through a loadlock chamber for rapid sample exchange. The PLD and sputter deposition chambers must be interconnected for in-vacuum sample transfer. The PLD must have in-situ RHEED for growth monitoring and allow substrate temperatures up to at least 950°C. The sputter will allow for DC magnetron sputtering at substrate temperature up to 700°C. The system must be compatible with the use of flag-style-type sample carrier plates and transfer to an externally provided vacuum suitcase for transport to other ex-situ characterization tools.</cbc:Description>
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