Kort beskrivning
This procurement is made on behalf of the Quantum Technology (QT) laboratory at the department
of Microtechnology and Nanoscience (MC2), Chalmers University of Technology.
The Vapor HF (Hydrogen Fluoride) Etcher that is intended to be procured, will be installed in the NFL
cleanroom at MC2. The System is intended to help with the selective removal of the native oxide of
the silicon substrate. The purchase is supported by WACQT, but other researchers are welcome to
use the tool for applications requiring the isotropic removal of silicon oxide. The System is meant to
operate on single wafers for university R&D.