TilldelningskriterierKvalitetskriterium - Namn: Specify whether ozone source is included or not. / Viktning: 0
Kvalitetskriterium - Namn: Specify the leak rate of the ALD chamber. Describe the measurement procedure in attachment. / Viktning: -300000 SEK
Kvalitetskriterium - Namn: Specify how long the warranty is in years. See what is included in the warranty in the Demands specification / Viktning: 0
Kvalitetskriterium - Namn: The tenderer should provide access to their existing process library as well as processes developed in the / Viktning: 0
Kvalitetskriterium - Namn: Support for ALD process development should be included in the tender. / Viktning: 0
Kvalitetskriterium - Namn: The tenderer, or a subcontractor, should provide interactive support on SE data acquisition and analysis. / Viktning: 0
Kvalitetskriterium - Namn: Specify whether the tendered system has spare ports that can be used for additional instrumentation such as / Viktning: -15000 SEK
Kvalitetskriterium - Namn: Specify whether the tendered system has spare ports that can be used for additional instrumentation such as / Viktning: 0
Kvalitetskriterium - Namn: Specify the estimated operation time before maintenance or part replacement is required. / Viktning: 0
Pris - Viktning: 3 600 000 SEK