Supplies - 428128-2022

05/08/2022    S150

Denmark-Kgs. Lyngby: Laboratory, optical and precision equipments (excl. glasses)

2022/S 150-428128

Voluntary ex ante transparency notice


Legal Basis:
Directive 2014/24/EU

Section I: Contracting authority/entity

I.1)Name and addresses
Official name: Danmarks Tekniske Universitet - DTU
National registration number: 30060946
Postal address: Anker Engelunds Vej 1
Town: Kgs. Lyngby
NUTS code: DK01 Hovedstaden
Postal code: 2800
Country: Denmark
Contact person: Christian Torrendrup
Telephone: +45 23100296
Internet address(es):
Main address:
I.4)Type of the contracting authority
Body governed by public law
I.5)Main activity

Section II: Object

II.1)Scope of the procurement

Electron-Beam Evaporation System

II.1.2)Main CPV code
38000000 Laboratory, optical and precision equipments (excl. glasses)
II.1.3)Type of contract
II.1.4)Short description:

This tool supply is concerning an Electron-Beam Evaporation system for thin-film deposition of various metal layers (single/multiple) on various substrates, typical 2”, 4”, and 6” wafers for device fabrication based on top-down micro/nano technology. High uniformity as well as avoiding sidewall deposition for lift-off processes and a high throughput is essential.

II.1.6)Information about lots
This contract is divided into lots: no
II.1.7)Total value of the procurement (excluding VAT)
Value excluding VAT: 3 700 000.00 DKK
II.2.2)Additional CPV code(s)
38000000 Laboratory, optical and precision equipments (excl. glasses)
II.2.3)Place of performance
NUTS code: DK01 Hovedstaden
II.2.4)Description of the procurement:

The tool should provide high-throughput solutions (total processing time < 15 min (process start at 5x10-6 Torr), including load/unload) for single wafer as well as larger wafer batches (4 substrates of up to 150 mm) for small-scale production. Moreover, the tool should cover multiple metal stacks depositions (up to ten different metals at a time).

A main application of the metal layer stacks is structure definition by lift-off, where it is essential to obtain highest possible control of uniformity and avoid sidewall deposition on the defined photoresist structures. For this particular application FerroTec-Temescal has developed a unique patented solution (US Patent# US9281231) named High-Uniformity Lift-off Assembly (HULA dome) which is a magnetically driven planetary motion substrate holder, in a lift-off configuration with up to 4 substrates of up to 150 mm, rotating individually on two axis, which can provide the high uniformity metal layer stack depositions without shadow masks which tends to be the standard solution in other systems. With the HULA system it is possible to deposit metal layer stacks with better than 2% uniformity and avoid sidewall deposition, with no shadow mask. Moreover, deposited material uniformity is independent of deposition rate, giving a wide process window.

The Temescal machine with the HULA system offers a completely unique approach to deposition of highly uniform metal stacks. Other manufacturers resort either to a very long distance from crucible to sample or to using shadow masks. The long distance leads to excessive waste of material which is a particular concern when dealing with expensive noble metals such as gold or platinum. Shadow masks must be designed for specific materials and specific deposition conditions and thus starkly limit the process window available for depositions. All in all the HULA option provides an efficient solution for reduced material consumption and maximum process window. Further advantages of evaporation without a mask are higher effective deposition rates, leading to faster cycle times and superior material collection efficiency, which is especially important when depositing expensive precious metals, such as Au & Pt. Moreover, the magnetically driven planetary motion substrate holder prevents the release of fine metal particles originating from moving parts in ordinary contact-drive gear systems during deposition. The contamination of metal particles from moving parts can be destructive for our applications, especially for deposition of very thin layers.

II.2.5)Award criteria
II.2.11)Information about options
Options: no
II.2.13)Information about European Union funds
The procurement is related to a project and/or programme financed by European Union funds: no
II.2.14)Additional information

Section IV: Procedure

IV.1.1)Type of procedure
Negotiated procedure without prior publication
  • The works, supplies or services can be provided only by a particular economic operator for the following reason:
    • protection of exclusive rights, including intellectual property rights

Given DTU’s strict requirements for this equipment concerning minimum waste of material, uniformity and avoidance of sidewall deposition combined with a short process time, this lift-off technology is considered the only relevant for DTU. Furthermore, the unique magnetically-driven HULA system prevents the release of fine metal particles from the planetary motion substrate holder which is critical for DTU in order to avoid contamination of the deposited thin films. The equipment can only be purchased from FerroTec-Temescal due to patent rights.

IV.1.3)Information about framework agreement
IV.1.8)Information about the Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement: yes
IV.2)Administrative information

Section V: Award of contract/concession

V.2)Award of contract/concession
V.2.1)Date of contract award decision:
V.2.2)Information about tenders
The contract has been awarded to a group of economic operators: no
V.2.3)Name and address of the contractor/concessionaire
Official name: Ferrotec (USA) Corporation
Town: Santa Clara
NUTS code: US United States
Country: United States
The contractor/concessionaire will be an SME: no
V.2.4)Information on value of the contract/lot/concession (excluding VAT)
Total value of the contract/lot/concession: 3 700 000.00 DKK
V.2.5)Information about subcontracting

Section VI: Complementary information

VI.3)Additional information:
VI.4)Procedures for review
VI.4.1)Review body
Official name: Klagenævnet for Udbud
Postal address: Nævnenes hus, Toldboden 2
Town: Viborg
Postal code: 8800
Country: Denmark
Telephone: +45 35291000
Internet address:
VI.4.3)Review procedure
Precise information on deadline(s) for review procedures:

Complaint that the Contracting Authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3.

VI.4.4)Service from which information about the review procedure may be obtained
Official name: Konkurrence- og Forbrugerstyrelsen
Postal address: Carl Jacobsens Vej 35
Town: Valby
Postal code: 2500
Country: Denmark
Telephone: +45 41715000
Internet address:
VI.5)Date of dispatch of this notice: